Deep Hole Drilling for Semiconductor Equipment Components
Semiconductor equipment might be the most demanding application for deep hole drilling outside of the medical industry. The components that go into wafer fabrication machines must meet extreme tolerances for cleanliness, dimensional accuracy, and material compatibility. I have drilled components for chemical vapor deposition chambers, physical vapor deposition systems, and wafer handling robots. The materials are almost always specialty grades of stainless steel, titanium, or aluminum, and every part must be contaminant-free. The precision requirements overlap with medical implant deep hole drilling in terms of cleanliness and tolerance, though the materials differ. ...
